With the maturity of 28 nanometer process technology, the demand for 28 nanometer process products is increasing.
At the same time, with the implementation of the “Made in China 2025″ strategy, many high-tech fields have a huge demand for integrated circuits, and higher and higher requirements will be placed on the design, production and packaging of LSI.
A wide variety of equipment and processes are used in the manufacture of large scale integrated circuits. Although professional technical personnel in their own process technology excellence, but they do not necessarily know the process production situation very well.
However, it is easy for individuals to overlook the negative impact of their own equipment and processes on the clean room environment.
Today, I’m going to share with you the sources of pollution in e-cleanrooms.
Pollution factors of electronic clean room:
One, electromagnetic noise
The scanning accuracy of electron beam scanning equipment is affected by the electromagnetic noise generated by the cable of oxidation furnace and other equipment with large current and the electromagnetic switch that repeatedly controls on and off and high-frequency oscillation. The degree of influence is inversely proportional to the distance of the source.
Second, the vibration
When the vacuum pump motor in the equipment works, the vibration will be transmitted through the floor to the precision equipment such as micro-machining equipment and microscope, which will affect their working accuracy.
The air spring shock absorber should be installed under the vibration source and the equipment afraid of vibration, in order to achieve the purpose of damping vibration.
Third, the rust
Acid hood local exhaust air quantity is insufficient, acid mist gas diffusion in the room, corrode the metal part of indoor equipment, is stainless steel exposed in the air containing chlorine gas, will also be corroded rust.
The most effective way to deal with acid is to use a closed ventilation hood to ensure adequate local air discharge.
In addition to these well-known reasons, equipment and equipment removal and overhaul of the construction of pollution problems.
The pollution is not only caused by the movement of people. The movement of equipment also throws up dust that has landed on floor surfaces and equipment.
Especially when changing equipment to maintain the floor, moving small tools or many porters into and out of the clean room, these situations can cause the amount of suspended dust in the room to be more than one hundred times larger than normal.
In the construction of partial clean room renovation, people usually lay pipes under the floor or sit on the floor to do the work. This kind of construction sometimes cuts the pipe, then the PVC pipe and stainless steel etc. Chip powder fly out.
So when overhaul, although hang around file cloth to maintain, but as a result of construction personnel in and out, the pollution is not only local scope, and the whole room is seriously polluted.
In a clean room, dust is emitted when only someone is operating and equipment is running. Instead of being caught by the hePA filter along with the circulating airflow, some of the dust always accumulates on the floor, walls and surface of the equipment. This dust should be removed to keep the clean room clean.
In general, an online clean area monitoring system is necessary to monitor the clean area 24 hours a day so that problems can be detected and resolved in a timely manner.
Post time: Jan-25-2021